Two Methods for Measuring Lamellae Thicknesses In situ for Improved FIB Specimen Preparation
نویسندگان
چکیده
منابع مشابه
Improved focused ion beam target preparation of (S)TEM specimen--a method for obtaining ultrathin lamellae.
Specimen quality is vital to (scanning) transmission electron microscopy (TEM) investigations. In particular, thin specimens are required to obtain excellent high-resolution TEM images. Conventional focused ion beam (FIB) preparation methods cannot be employed to reliably create high quality specimens much thinner than 20 nm. We have developed a method for in situ target preparation of ultrathi...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2019
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927619005026